As a particle impinges the target surface, a crater and a mound around the crater are formed. The size of the crater and the mound varies with particle parameters such as particle size, shape, impact velocity, and angle. The particle impact velocities were measured using a Particle Image Velocimetry (PIV) system. A microscopic surface profiler measured the depths and volumes of the crater and the mounds formed on the surface. Deep and narrow craters were observed on the surface when impacted by sharp particles. However, for round particles, the craters were found to be wider and more significant in volume. However, the ratio of the volume of the mound to the crater volumes was much larger for sharper particles than for the rounded particles. The mechanistic erosion model developed previously was modified to determine the deformation caused due to single particle impact and was compared to experimental measurements. The model predictions were found to be comparable to experimental data for the crater depth. In contrast, the original model was in fair agreement with the trend of the data for crater volume, but the magnitudes were off only by a constant factor.